Flat Panel Display
The application of target materials in the flat panel display industry mainly includes two types of products: display panel and touch screen panel. Flat panel displays have the characteristics of thin thickness, light weight, low energy consumption, low radiation, no flicker, and long life, which meet people's requirements for lightness, portability, energy saving and environmental protection. It has become the mainstream of the display industry and is widely used in consumer electronic products such as flat-panel TVs, mobile phones, tablet computers, and notebook computers.
5G Field
Aluminum nitride scandium films are widely used in 5G chip manufacturing. At present, there are two kinds of coating processes: one is reactive sputtering, which directly uses aluminum-scandium alloy target to make aluminum-scandium nitride film by reactive sputtering; the other uses aluminum nitride-scandium target to directly make aluminum-scandium nitride film.
Solar Cells/Thermoelectric
Thin-film solar cells are new photovoltaic devices to alleviate the energy crisis. Thin-film solar cells can be fabricated using different materials such as ceramics, graphite, and metal sheets as substrates. Thin-film solar cells are widely used, and the target materials used in this industry are mainly CdTe, CIGS, GaAS, polysilicon and other types.
Optical Field
The purpose of PVD coating on the surface of optical parts is to reduce or increase light reflection, beam splitting, color separation, filtering, polarization and other requirements. The main uses of optical coating materials are divided into composite film, color film, anti-reflection film, UV-transmitting film, laser device filter, protective film, transparent conductive film, color-changing film, reflective film, various lens coatings, etc.
Storage Field
The 21st century is a high-tech era of informatization and information digitization. Advanced electronic computers, surveillance cameras, and automated equipment for acquiring, processing, storing, and transmitting various information all require storage devices. Information storage includes magnetic information storage, magneto-optical information storage, all-optical information storage, and phase-change storage. The sputtered films used for recording include alloys such as chromium-based, cobalt-based, cobalt-iron-based, and nickel-based.
Semiconductor Chip
Targets used for semiconductor manufacturing represent one of the highest standards in the coating material industry. With the rapid development of information technology, the requirements of integrated circuits are getting higher and higher, and the size of the unit devices in the circuit is constantly shrinking, and the size of the components is from millimeters to micrometers, and then to nanometers. The interior of each unit device is composed of a substrate, an insulating layer, a dielectric layer, a conductor layer, and a protective layer. Among them, the dielectric layer, the conductor layer and even the protective layer all undergo a sputtering coating process. Coating targets in the field of integrated circuits mainly include aluminum targets, titanium targets, copper targets, tantalum targets, tungsten-titanium targets, etc., and the purity of the target materials is required to be very high, generally above 5N (99.999%). Therefore, the target material for semiconductor coating is expensive.
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